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Integrated microspectrometer with elliptical Bragg mirror enhanced diffraction grating on silicon on insulator

机译:绝缘体上硅上具有椭圆布拉格镜增强型衍射光栅的集成显微光谱仪

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摘要

An on-chip micro-spectrometer is demonstrated based on a circular diffraction grating consisting of an elliptical Bragg mirror. This structure results in a highly efficient and compact device with simplified processing requirements, useful for sensing, spectroscopy, telecom demultiplexing, and optical interconnects. The computed efficiency for a realistic geometry is 0.14 dB, which represents to the best of our knowledge the highest predicted efficiency for concave diffraction gratings (echelle/echelette gratings). The first realization of the elliptical Bragg mirror diffraction grating spectrometer is presented on silicon on insulator at a wavelength of 1.55 µm. Measurements show a full device efficiency of 3.0 dB, including all in-line losses, with a band flatness of 0.4 dB over 30 nm.
机译:演示了一种基于圆形衍射光栅的片上微光谱仪,该椭圆光栅由椭圆布拉格镜组成。这种结构导致具有简化的处理要求的高效且紧凑的设备,可用于传感,光谱学,电信解复用和光互连。实际几何形状的计算效率为0.14 dB,据我们所知,这表示凹面衍射光栅(阶梯光栅/小阶梯光栅)的最高预测效率。椭圆布拉格镜衍射光栅光谱仪的第一个实现是在绝缘体上的硅上以1.55 µm的波长实现的。测量表明,包括所有在线损耗在内的整个器件效率为3.0 dB,在30 nm范围内的带平坦度为0.4 dB。

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